DocumentCode
2163942
Title
Surface-micromachined MEMS corner cube retro-reflector array
Author
Yu-fan Chen ; Hsu-Tang Chang ; Bo-Jiun Chen ; Jui-che Tsai
Author_Institution
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
fYear
2013
fDate
18-22 Aug. 2013
Firstpage
105
Lastpage
106
Abstract
A linear array of MEMS corner cube retro-reflectors (CCR) fabricated with the MUMPs polysilicon surface micromachining process is presented. The CCR´s opening faces straight upwards, providing ease of use and better field of view. Tunability can be achieved by employing a drivable mirror as one of the CCR´s three mirrors. A novel idea of assembling an N × N CCR array is also proposed.
Keywords
elemental semiconductors; micro-optomechanical devices; micromachining; micromirrors; optical arrays; optical fabrication; optical tuning; retroreflectors; silicon; CCR array; MUMP polysilicon surface micromachining process; Si; drivable mirror; linear array; surface-micromachined MEMS corner cube retroreflector array; Arrays; Latches; Micromechanical devices; Mirrors; Optical device fabrication; Optical reflection; Optical scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS and Nanophotonics (OMN), 2013 International Conference on
Conference_Location
Kanazawa
ISSN
2160-5033
Print_ISBN
978-1-4799-1512-5
Type
conf
DOI
10.1109/OMN.2013.6659081
Filename
6659081
Link To Document