Experimental verification of phononic crystal slab based silicon microresonators

Author

Nan Wang ; Min Tang ; Fu-Li Hsiao ; Chong Pei Ho ; Palaniapan, Moorthi ; Dim-Lee Kwong ; Chengkuo Lee

Author_Institution

Dept. of Electr. & Comput. Eng., Nat. Univ. of Singapore, Singapore, Singapore

fYear

2013

fDate

18-22 Aug. 2013

Firstpage

131

Lastpage

132

Abstract

This paper reports experimentally measured data of two microfabricated resonators, namely a Fabry-Perot (FP) resonator and a reduced central-hole (RCH) resonator, formed by engineering different defects on an otherwise perfect phononic crystal (PnC) slab. Experimental results, which are well supported by the numerically simulated data, show that the RCH resonator has higher Q factor, higher resonant frequency and lower insertion loss than the FP resonator. Finite-element-modelling (FEM) analysed steady-state displacement profiles of the two resonators show that the higher Q factor obtained by the RCH resonator is caused by its superior ability of the energy confinement within the defected region.

Keywords

Fabry-Perot resonators; Q-factor; elemental semiconductors; finite element analysis; micro-optomechanical devices; microfabrication; micromechanical resonators; optical fabrication; optical losses; phononic crystals; silicon; FEM; Fabry-Perot resonator; Q-factor; Si; energy confinement; finite element modelling; insertion loss; microfabricated resonators; numerical simulation; phononic crystal slab based silicon microresonators; reduced central-hole resonator; resonant frequency; steady-state displacement profiles; Crystals; Finite element analysis; Optical resonators; Q-factor; Resonant frequency; Silicon; Slabs;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2013 International Conference on

Conference_Location

Kanazawa

ISSN

2160-5033

Print_ISBN

978-1-4799-1512-5

Type

conf

DOI

10.1109/OMN.2013.6659094

Filename

6659094