Electrostatic MEMS tunable split-ring resonators for THz filter applications

Author

Zhengli Han ; Kohno, Kenta ; Haatainen, Tomi ; Makela, Tapio ; Fujita, Hideaki ; Hirakawa, Keisuke ; Toshiyoshi, Hiroshi

Author_Institution

Inst. of Ind. Sci., Univ. of Tokyo, Tokyo, Japan

fYear

2013

fDate

18-22 Aug. 2013

Firstpage

165

Lastpage

166

Abstract

We propose a new use of an RF-MEMS (radio frequency - micro electro mechanical systems) capacitive switch to construct a tunable terahertz filter. The built-in capacitor within a split-ring resonator is electrostatically actuated to shift the resonant frequency, providing a behavior as an ON/OFF switch for a particular frequency in the terahertz band. The device is compatible with the surface micromachining process of metals as well as with the roll-to-roll printing patterning for large and flexible sheet filters.

Keywords

capacitors; micro-optomechanical devices; micromechanical resonators; microwave photonics; optical filters; optical resonators; optical switches; THz filter applications; built-in capacitor; capacitive switches; electrostatic MEMS tunable split-ring resonators; metals; radio frequency-microelectromechanical systems; resonant frequency; roll-to-roll printing patterning; surface micromachining process; tunable terahertz filter; Capacitors; Micromechanical devices; Optical filters; Optical resonators; Resonant frequency; Resonator filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS and Nanophotonics (OMN), 2013 International Conference on

Conference_Location

Kanazawa

ISSN

2160-5033

Print_ISBN

978-1-4799-1512-5

Type

conf

DOI

10.1109/OMN.2013.6659111

Filename

6659111