Capacity analysis of automated material handling systems in semiconductor fabs

Author

Kuhl, Michael E. ; Christopher, Julie

Author_Institution

Dept. of Ind. & Syst. Eng., Rochester Inst. of Technol., NY, USA

Volume

2

fYear

2004

fDate

5-8 Dec. 2004

Firstpage

1962

Abstract

A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have increased, semiconductor fabs have moved toward the use of automated material handling systems (AMHS). However, the behavior of AMHS and the effects of AMHS on fab productivity is not well understood. This research involves the development of a design and analysis methodology for evaluating the throughput capacity of AMHS. A set of simulation experiments is used to evaluate the throughput capacity of an AMHS and the effects on fab performance measures. The analysis uses SEMATECH fab data for full semiconductor fabs to evaluate the AMHS throughput capacity.

Keywords

electronics industry; materials handling; production control; semiconductor device manufacture; SEMATECH fab data; automated material handling systems; capacity analysis; production control polices; semiconductor fabs; semiconductor manufacturing; Analytical models; Dispatching; Fabrication; Materials handling; Modeling; Production systems; Productivity; Semiconductor device manufacture; Throughput; Virtual manufacturing;

fLanguage

English

Publisher

ieee

Conference_Titel

Simulation Conference, 2004. Proceedings of the 2004 Winter

Print_ISBN

0-7803-8786-4

Type

conf

DOI

10.1109/WSC.2004.1371556

Filename

1371556