DocumentCode
2174502
Title
A new method for comparing migration abilities of conductor systems based on conventional electroanalytical techniques
Author
Harsanyi, Gabor ; Inzelt, George
Author_Institution
Dept. of Electron. Technol., Tech. Univ. Budapest, Hungary
fYear
2000
fDate
2000
Firstpage
1666
Lastpage
1673
Abstract
There are various metallization types, pure metals as well as alloys, showing very different abilities for migration. Their comparison is available only through empirical way. There are two main possibilities for getting information or comparison about the migration behavior of a sample: the water drop test and accelerated climatic tests. The results are generally uncertain showing large spreading and can only be interpreted with difficulties. Further problems are the undefined conditions and many subjective things with the Water Drop (WD) test while rather long periods of tests and special test chambers are necessary to perform climatic tests. A third method has been developed and will be presented in the paper for testing metallization systems based on a powerful technique; this is the very well known cyclic voltammetry used in the electroanalytical chemistry. The results indicate an effective method for making quick comparison between metallization systems in connection with their migration abilities
Keywords
electromigration; metallisation; voltammetry (chemical analysis); accelerated climatic test; conductor system; cyclic voltammetry; electroanalytical technique; electrochemical migration; metallization; water drop test; Chemical technology; Chemistry; Conductors; Integrated circuit interconnections; Life estimation; Metallization; Performance evaluation; Power system interconnection; Production systems; System testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components & Technology Conference, 2000. 2000 Proceedings. 50th
Conference_Location
Las Vegas, NV
Print_ISBN
0-7803-5908-9
Type
conf
DOI
10.1109/ECTC.2000.853443
Filename
853443
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