DocumentCode
2185527
Title
Pumping mechanisms in sputter-ion pumps low pressure operation
Author
Welch, Kimo M.
Author_Institution
Brookhaven Nat. Lab., Upton, NY, USA
fYear
1991
fDate
6-9 May 1991
Firstpage
2269
Abstract
It is shown that significant H/sub 2/ pumping occurs in the walls of triode pumps. Also, H/sub 2/ is pumped in the anode cells of sputter-ion pumps. This pumping occurs in a manner similar to that by which the inert gases are pumped. That is, H/sub 2/ is pumped in the walls of the anode cells by high-energy neutral burial. Hydrogen in the pump walls and anodes limits the base pressure of the pump.<>
Keywords
ion pumps; particle accelerator accessories; H/sub 2/; H/sub 2/ pumping; anode cells; base pressure; high-energy neutral burial; inert gases; sputter-ion pumps low pressure operation; triode pumps; Anodes; Cathodes; Chemicals; Diodes; Electrons; Gases; Hydrogen; Laboratories; Magnetic materials; Steel;
fLanguage
English
Publisher
ieee
Conference_Titel
Particle Accelerator Conference, 1991. Accelerator Science and Technology., Conference Record of the 1991 IEEE
Conference_Location
San Francisco, CA, USA
Print_ISBN
0-7803-0135-8
Type
conf
DOI
10.1109/PAC.1991.164936
Filename
164936
Link To Document