DocumentCode
2185684
Title
Integrated thin-film micropotentiometers
Author
Kinard, J.R. ; Huang, D.X. ; Novotny, D.B.
Author_Institution
Electr. Div., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fYear
1994
fDate
June 27 1994-July 1 1994
Firstpage
380
Lastpage
381
Abstract
Integrated micropotentiometers, new devices fabricated with thin-film technology and the micromachining of silicon, have been developed for the accurate determination of ac voltage from 1 to 200 mV up to 100 kHz and with the potential for higher frequencies.<>
Keywords
calibration; elemental semiconductors; integrated circuit technology; measurement standards; potentiometers; silicon; thin film resistors; voltage measurement; 1 to 200 mV; 100 kHz; Si; ac voltage; integrated thin-film micropotentiometers; micromachining; thin-film technology; Biomembranes; Current measurement; Frequency; Micromachining; Resistors; Semiconductor thin films; Silicon; Skin effect; Transistors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Precision Electromagnetic Measurements, 1994. Digest., 1994 Conference on
Conference_Location
Boulder, CO, USA
Print_ISBN
0-7803-1984-2
Type
conf
DOI
10.1109/CPEM.1994.333347
Filename
333347
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