SXLS phase II vacuum system

Author

Schuchman, J.C. ; Chou, T.S. ; Halama, H. ; Hsieh, H. ; Kim, T. ; Pjerov, S. ; Staicu, F.

Author_Institution

Brookhaven Nat. Lab., Upton, NY, USA

fYear

1991

fDate

6-9 May 1991

Firstpage

2316

Abstract

The Phase II design of the Superconducting X-ray Lithography Source (SXLS) consists of replacing the two room-temperature 180 degrees C dipole magnets of Phase I with superconducting magnets. However, even though superconducting magnets are used, the vacuum chambers within them will operate at room temperature. The chambers are constructed as weldments and are made of INCONEL-625. They are bakeable to 150 degrees C in situ and incorporate nine photon beam ports. Each has built-in distributed sputter-ion pumps, (DIP), nonevaporable getter pumps, beam position monitors, and ion clearing electrodes. R&D is underway to optimize the DIP, which must operate at 3.86 T, and to develop a low photo yield coating or treatment for the internal surface of the chambers.<>

Keywords

beam handling equipment; electron accelerators; particle accelerator accessories; superconducting magnets; synchrotrons; vacuum apparatus; INCONEL-625; SXLS phase II vacuum system; Superconducting X-ray Lithography Source; bakeable; beam position monitors; built-in distributed sputter-ion pumps; dipole magnets; ion clearing electrodes; nonevaporable getter pumps; photon beam ports; room temperature; superconducting magnets; vacuum chambers; weldments; Coatings; Electrodes; Electronics packaging; Gettering; Laser excitation; Superconducting magnets; Temperature; Vacuum systems; Welding; X-ray lithography;

fLanguage

English

Publisher

ieee

Conference_Titel

Particle Accelerator Conference, 1991. Accelerator Science and Technology., Conference Record of the 1991 IEEE

Conference_Location

San Francisco, CA, USA

Print_ISBN

0-7803-0135-8

Type

conf

DOI

10.1109/PAC.1991.164951

Filename

164951