• DocumentCode
    2188319
  • Title

    Proposal of N-channel heterostructure dynamic threshold-voltage MOSFET (HDTMOS) with P-type doped SiGe body

  • Author

    Kawashima, T. ; Takagi, T. ; Hara, Y. ; Kanzawa, Y. ; Inoue, A. ; Sorada, H. ; Nozawa, K. ; Asai, A. ; Ohnishi, T. ; Kubo, M.

  • Author_Institution
    Adv. Technol. Res. Lab., Matsushita Electr. Ind. Co. Ltd., Osaka, Japan
  • fYear
    2002
  • fDate
    24-26 June 2002
  • Firstpage
    51
  • Lastpage
    52
  • Abstract
    In this work, we have focused on boosting the performance of the N-channel DTMOS which is promising for low-power analogue/RF circuits. Since the band offset appears mainly at the valence band and there is no conduction band offset in the Si/SiGe heterostructures, it is impossible to improve the performance of N-HDTMOS by the same approach as P-HDTMOS. As an alternative approach using heterojunction band engineering, we have proposed a novel N-channel HDTMOS technology for the first time.
  • Keywords
    Ge-Si alloys; MOSFET; semiconductor materials; N-channel heterostructure dynamic threshold-voltage MOSFET; P-type doped SiGe body; Si-SiGe; Si/SiGe heterostructure; band offset; heterojunction band engineering; Application specific integrated circuits; Body regions; Doping; Germanium silicon alloys; Heterojunctions; MOSFET circuits; Power MOSFET; Proposals; Silicon germanium; Threshold voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Device Research Conference, 2002. 60th DRC. Conference Digest
  • Conference_Location
    Santa Barbara, CA, USA
  • Print_ISBN
    0-7803-7317-0
  • Type

    conf

  • DOI
    10.1109/DRC.2002.1029502
  • Filename
    1029502