Finite element analysis of magnetic structures for micro-electro-mechanical relays

Micro-electro-mechanical system technology offers great promise in addressing the need for smaller electromechanical relays, and may bridge the performance and economic gaps between conventional electromechanical technology and solid state devices. It is necessary for electromagnetic field analysis during design process of micro-electro-mechanical relay. Planar coil and magnetic plate structures were modeled by using finite element method in this paper. Furthermore the open domain magnetic field views of micro-electro-mechanical relay with different structures were compared. And the electromagnetic attraction force of movable contacts in MEMS relay was analyzed, thus can not only simplify the fabrication procedure, but also develop the working performance of products. The results of the analysis can be useful for designers to develop optimal magnetic structure of micro-electro-mechanical relays.