Development of 3D thermoelectric generators using Bi and Sb elements

This paper presents new devices to scavenge energy by developing a miniature power source for operating electronic components. Following our development of 2D thermoelectric devices, we conceived new processes and technology steps to develop 3D devices. Thermoelectric (TE) devices are realized with bismuth and antimony layers. These two elements are deposited by PVD (Physical Vapour Deposition). Bi and Sb micro-devices have been manufactured with an area of 1 cm², including more than 63000 junctions. Each step of process fabrication has been optimized and will be presented. Different devices structures have been realized. Thus each devices performance will be reviewed and estimated as a function of their structure design.