Microdevices for biomolecular and single cell detection

Recent advances towards developing biomolecular and single cell applications for a mass-based biosensor known as the suspended microchannel resonator (SMR) will be presented. In SMR detection, target molecules or cells flow through a vibrating suspended microchannel and are captured by receptor molecules attached to the interior channel walls. What separates the SMR from the existing resonant mass sensors is that the receptors, targets, and their aqueous environment are confined inside the resonator, while the resonator itself can oscillate at high Q in an external vacuum environment, thus yielding extraordinarily high sensitivity. This approach solves the problem of viscous damping that degrades the sensitivity of cantilever resonators in solution. We have achieved a resolution of approximately 300 attograms which is represents an improvement of six order of magnitude improvement over a high-end commercial quartz crystal microbalance. This gives access to intriguing applications such as mass based flow cytometry or the direct detection of cancer biomarkers.