The study of MEMS millimeter wave phase shifter

Author

Guo, F.M. ; Lai, Z.S. ; Zhu, S.Z. ; Zhu, Z.Q. ; Zhu, R.J. ; Zheng, Y. ; Yang, GQ ; Li, A.Z.

Author_Institution

Dept. of Electr. Eng., East China Normal Univ., Shanghai, China

fYear

2002

fDate

2002

Firstpage

273

Lastpage

276

Abstract

Several designs of MEMS millimeter-wave phase shifters are presented. They consist of a coplanar waveguide (CPW) transmission line periodically loaded with 8∼32 metal bridges, functioning as capacitive switches. Every switching element consists of a thin metallic membrane actuated by applied bias. Remarkable phase shifter performances were observed. One MEMS phase shifter reached to 372°/3.5 mm under 20 V bias at 35 GHz, with an insertion loss (S₂₁) of about 4∼7 dB.

Keywords

coplanar transmission lines; coplanar waveguides; micromechanical devices; millimetre wave phase shifters; switches; 20 V; 35 GHz; CPW transmission line; MEMS millimeter wave phase shifter; MM wave phase shifter; bias; capacitive switches; coplanar waveguide transmission line; insertion loss; metal bridges; metallic membrane; millimeter-wave phased antenna array; switching element; Bridge circuits; Coplanar waveguides; Frequency; Insertion loss; Micromechanical devices; Millimeter wave communication; Millimeter wave radar; Millimeter wave technology; Phase shifters; Scattering parameters;

fLanguage

English

Publisher

ieee

Conference_Titel

Radio and Wireless Conference, 2002. RAWCON 2002. IEEE

Print_ISBN

0-7803-7458-4

Type

conf

DOI

10.1109/RAWCON.2002.1030170

Filename

1030170