DocumentCode
2207095
Title
Novel sub-25 nm devices [MOSFETs]
Author
Deshpande, Heinant V. ; Woo, Jason C S
Author_Institution
Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA
Volume
1
fYear
2001
fDate
2001
Firstpage
521
Abstract
Recently, there has been much discussion concerning the scaling of MOSFETs into sub-50 nm dimensions. Many fundamental device problems such as short channel effects (DIBL and Vth roll-off), off-state, leakage current, parasitic capacitance and resistance, and gate tunneling current are currently being examined. It is apparent that sub-50 nm transistors can be realized with performance limited primarily by parasitics such as series resistance and capacitance. However, for sub-50 nm devices, new innovation is necessary. The difficulties and challenges to further scaling of CMOS, from digital as well as analog viewpoint are discussed in this paper. Possible new solutions like single pocket structures, Schottky MOSFETs, and double gate MOSFETs are also discussed in this context
Keywords
MOSFET; capacitance; leakage currents; tunnelling; 10 to 50 nm; CMOS; MOSFETs; gate tunneling current; off-state leakage current; parasitic capacitance; parasitic resistance; short channel effects; single pocket structures; 1f noise; CMOS technology; Logic design; MOSFETs; Parasitic capacitance; Power supplies; RF signals; Radio frequency; Threshold voltage; Tunneling;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on
Conference_Location
Shanghai
Print_ISBN
0-7803-6520-8
Type
conf
DOI
10.1109/ICSICT.2001.981532
Filename
981532
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