Micro-cantilever Array Pressure Measurement System for Biomedical Instrumentation

Author

Qu, Wenchao ; Islam, Syed K. ; To, Gary ; Mahfouz, Mohamed R.

Author_Institution

Univ. of Tennessee, Knoxville

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

1009

Lastpage

1012

Abstract

An analog signal processing IC for micro-cantilever array is designed for pressure measurement in biomedical applications. The chip includes analog multiplexer, instrumentation amplifier, sample and hold circuit, on chip voltage reference, SAR ADC and digital control unit. The 8-b ADC attains 45.4 dB SNDR and 56.4 dB SFDR while operating at 772 KHz. The chip occupies an area of 1.54 mm² and consumes 17.8 mW power with a single 3.3 V supply. The chip was fabricated in a 0.35 mum 2-poly 4-metal process.

Keywords

biomedical equipment; cantilevers; mixed analogue-digital integrated circuits; pressure measurement; 2-poly 4-metal process; SAR ADC; analog multiplexer; analog signal processing integrated circuit; biomedical instrumentation; digital control unit; frequency 772 kHz; instrumentation amplifier; micro-cantilever array pressure measurement; on chip voltage reference; power 17.8 mW; sample and hold circuit; size 0.35 mum; voltage 3.3 V; word length 8 bit; Analog integrated circuits; Application specific integrated circuits; Array signal processing; Biomedical measurements; Biomedical signal processing; Digital control; Instruments; Multiplexing; Pressure measurement; Signal design;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388575

Filename

4388575