A fuzzy model of inductively coupled plasma by adaptive-network-based fuzzy inference system (ANFIS)

Summary form only given, as follows. The chemical and physical reactions of plasma are complex and nonlinear. The controller design is limited at some operation points by the conventional method. For a nonlinear controller design, to build a model is beneficial. The paper reports a fuzzy model that simulates the behaviors of the inductive mode and the capacitive mode in inductively coupled plasmas by using an adaptive-network-based fuzzy inference system (ANFIS). In the study, 13.56 MHz RF power and pressure are input variables and the electron density is the output variable. The electron density was measured by a 36 GHz heterodyne interferometer. The training data for ANFIS were collected by varying different RF power at different pressure levels. This research has demonstrated a simplified method to synthesize a nonlinear system that can cover the characteristics of the capacitive mode and inductive mode. It is helpful to simulate a controller performance before applying to a real plasma system.