• DocumentCode
    2209542
  • Title

    Plasma torch and its associated MHD fields using the FLUENT code

  • Author

    Merkhauf, A. ; Hue, S. ; Proulx, P. ; Bolous, M.A.

  • Author_Institution
    Dept. of Chem. Eng., Sherbrooke Univ., Que., Canada
  • fYear
    2000
  • fDate
    4-7 June 2000
  • Firstpage
    222
  • Abstract
    Summary form only given. Reported studies dealing with the mathematical modeling of the r.f. inductively coupled plasma provide information about 2D flow, temperature and species concentration as well as electromagnetic fields in the discharge. The majority of the proposed models require, however, a lengthy iterative process to converge, where sometimes several thousands of iterations can be needed. In order to speed up the calculation and increase the flexibility of the model, the CFD code FLUENT is used. The later is based on the solution of the Navier-Stokes equations using the control volume method of Patankar. User defined subroutines are added to the code to implement the vector potential equation and the source terms, as Lorentz force, radiation and joule heating acting on the plasma. Subroutines are also implemented to allow thermodynamics and transport properties to be function of temperature and pressure. The torch is modeled by a fully axisymmetric configuration. A laminar flow field is assumed, for an optically thin plasma under local thermodynamic equilibrium. The inductor is represented by a series of parallel current ring. In the present study, emphasis is placed on the formulation of the MHD induction equation where the electromagnetic fields are not limited to the torch itself, but extend well beyond the torch.
  • Keywords
    Navier-Stokes equations; plasma magnetohydrodynamics; plasma ohmic heating; plasma pressure; plasma simulation; plasma temperature; plasma thermodynamics; plasma torches; plasma transport processes; 2D flow; FLUENT CFD code; Lorentz force; MHD fields; MHD induction equation; Navier-Stokes equations; RF inductively coupled plasma; control volume method; electromagnetic fields; fully axisymmetric configuration; iterative process; joule heating; laminar flow field; local thermodynamic equilibrium; mathematical modeling; optically thin plasma; parallel current ring; plasma torch; pressure; radiation; species concentration; temperature; thermodynamics; transport properties; user defined subroutines; vector potential equation; Algorithms; Electromagnetic fields; Magnetohydrodynamics; Mathematical model; Navier-Stokes equations; Plasma properties; Plasma sources; Plasma temperature; Plasma transport processes; Thermodynamics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2000. ICOPS 2000. IEEE Conference Record - Abstracts. The 27th IEEE International Conference on
  • Conference_Location
    New Orleans, LA, USA
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-5982-8
  • Type

    conf

  • DOI
    10.1109/PLASMA.2000.855045
  • Filename
    855045