A Multi-Parameter Platform For Gas Sensing Using Semiconducting Metal Oxide Films

Author

Zhong, Guixiong ; Bernhardt, George ; Lad, Robert ; Collins, Scott ; Smith, Rosemary

Author_Institution

Univ. of Maine, Orono

fYear

2007

fDate

28-31 Oct. 2007

Firstpage

1225

Lastpage

1228

Abstract

A multi-parameter sensor platform for engineering gas responsive semiconducting metal oxide (SMO) materials and gas sensors is demonstrated. The platform combines a chemiresistor with a Metal Oxide Semiconductor (MOS) capacitor for the detection of oxidation-reduction reactions occurring in SMO films. With this platform, changes in resistance, work function, and capacitance of the SMO film can be simultaneously measured upon exposure to reducing or oxidizing gases, such as NO_x, CO, H₂O or O₂. The relative contributions of materials parameters on sensor response can be elucidated from the resulting measurements and utilized for improved understanding of sensing mechanisms and optimizing sensor design.

Keywords

MOS capacitors; gas sensors; work function; MOS capacitor; SMO films; chemiresistor; gas responsive semiconducting metal oxide materials; gas sensing; gas sensors; metal oxide semiconductor capacitor; multiparameter sensor platform; oxidation-reduction reactions; semiconducting metal oxide films; sensor response; work function; Capacitance measurement; Chemical sensors; Electrical resistance measurement; Gas detectors; Gases; Inorganic materials; MOS capacitors; Semiconductivity; Semiconductor films; Semiconductor materials;

fLanguage

English

Publisher

ieee

Conference_Titel

Sensors, 2007 IEEE

Conference_Location

Atlanta, GA

ISSN

1930-0395

Print_ISBN

978-1-4244-1261-7

Electronic_ISBN

1930-0395

Type

conf

DOI

10.1109/ICSENS.2007.4388630

Filename

4388630