• DocumentCode
    2209965
  • Title

    Single Gate EPROM Cell for the End-of-line Ionic Contamination Test

  • Author

    Mitros, Jozef C.

  • Author_Institution
    SEMATECH/National Semiconductor Co.
  • fYear
    1993
  • fDate
    24-27 Oct 1993
  • Firstpage
    40
  • Lastpage
    44
  • Keywords
    Capacitance-voltage characteristics; Contamination; Degradation; EPROM; Intrusion detection; MOSFETs; Passivation; Pollution measurement; Testing; Voltage;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Integrated Reliability Workshop Final Report, 1993 International
  • Type

    conf

  • DOI
    10.1109/IRWS.1993.666290
  • Filename
    666290