DocumentCode
2211191
Title
Separating DC biasing from RF modulation in EO polymer modulators integrated with mechanical resonators
Author
Yacoubian, A. ; Weiping Lin ; Khadjeturians, H. ; Bechtel, J. ; Johnson, G.C.
Author_Institution
IPITEK, Carlsbad, CA, USA
fYear
2002
fDate
7-9 Jan. 2002
Firstpage
5
Lastpage
8
Abstract
DC biasing and RF modulation of polymer modulators are separated by heterogeneously integrating them with mechanical resonators. Feasibility of integration with MEMS is investigated, and biasing is experimentally demonstrated by integration with a piezoelectric element.
Keywords
Mach-Zehnder interferometers; electro-optical modulation; micromechanical resonators; microwave photonics; optical communication equipment; optical polymers; piezoelectric devices; DC biasing; MEMS structures; MZ modulator; RF modulation; electro-optic polymer modulators; mechanical biasing; mechanical resonators; piezoelectric element; polymer/MEMS integration; Electrooptic devices; Electrooptic modulators; Electrooptical waveguides; Etching; Hafnium; Micromechanical devices; Optical resonators; Optical waveguides; Polymer films; Radio frequency;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Photonics, 2001. MWP '01. 2001 International Topical Meeting on
Conference_Location
Long Beach, CA, USA
Print_ISBN
0-7803-7003-1
Type
conf
DOI
10.1109/MWP.2002.981755
Filename
981755
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