• DocumentCode
    2212276
  • Title

    Effects of a loop array layer on a micro-inductor for future RF MEMS Components

  • Author

    Tassetti, Charles-Marie ; Lissorgues, Gaële ; Gilles, Jean-Paul

  • Author_Institution
    Groupe ESIEE, Cité Descartes, 93162 Noisy-le-Grand, France. Tel: +33 (0) 1 45 92 66 96, Email: tassettc@esiee.fr
  • fYear
    2003
  • fDate
    Oct. 2003
  • Firstpage
    29
  • Lastpage
    32
  • Abstract
    Tunable micro-inductors can be designed controlling magnetic coupling coefficient. This paper presents the inductance variation produced by loops strongly magnetically coupled with a micro-inductor. A compact lumped element model, based on the geometry, gives result in good agreement with measurements in the RF frequency range. Then, this model will be applied to the study of the tunable MEMS inductor described below.
  • Keywords
    Coupling circuits; Frequency; Impedance; Inductance; Inductors; Magnetic materials; Magnetic shielding; Permeability; Radiofrequency microelectromechanical systems; Tunable circuits and devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave Conference, 2003 33rd European
  • Conference_Location
    Munich, Germany
  • Print_ISBN
    1-58053-834-7
  • Type

    conf

  • DOI
    10.1109/EUMA.2003.340818
  • Filename
    4142946