DocumentCode
2212289
Title
GaAs MEMS for Millimeter Wave Communications
Author
Muller, Alexandru ; Konstantinidis, George ; Neculoiu, Dan ; Plana, Robert
Author_Institution
IMT Bucharest, 32B, Erou Iancu Nicolae Street, 72996, Bucharest, Romania, Phone: +40.21.4908581
fYear
2003
fDate
Oct. 2003
Firstpage
33
Lastpage
36
Abstract
The paper presents the authors´ contributions towards the development of millimeter wave circuits based on GaAs micromachining. The manufacturing and characterization of different type of millimeter wave GaAs membrane supported filter structures is presented. A fully monolithically integrated millimeter wave receiver module, having the antenna as well as the detecting Schottky diode on the same GaAs membrane is also presented.
Keywords
Biomembranes; Circuits; Filters; Gallium arsenide; MIMICs; Manufacturing; Micromachining; Micromechanical devices; Millimeter wave communication; Receiving antennas;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2003 33rd European
Conference_Location
Munich, Germany
Print_ISBN
1-58053-834-7
Type
conf
DOI
10.1109/EUMA.2003.340819
Filename
4142947
Link To Document