Sheet shaped plasma production using microwave-plasma interaction with ECR region

Summary form only given. To control the shape of high density plasma has been one of the issues for the application of plasma to industrial usages. Therefore, ECR plasma is a good candidate of a high density plasma. A sheet shaped high density plasma could be used to modify the surface of materials uniformly and as the basis for electron accelerators. The discharge parameters, such as ECR condition related to the magnetic field configuration, gas pressure, microwave wavelength, and power were parameters which affect the shape, size and density of plasma. The microwave propagation phenomenon is considered to be the nonlinear interaction between the plasma and microwave resulting in the final shape of plasma. This interaction has been studied by experiments measuring the plasma density profile in the plasma cross sections with different discharge parameters.