Zeolite-coated microcantilever gas sensor

Author

Zhou, Jia ; Li, Po ; Zhang, Song ; Zhou, Feng ; Huang, Yiping ; Yang, Pengyuan ; Bao, Minhang

Author_Institution

Dept. of Microelectron., Fudan Univ., Shanghai, China

Volume

2

fYear

2001

fDate

22-25 Oct. 2001

Firstpage

777

Abstract

A novel freon gas sensor consisting of a piezoelectric microcantilever coated with zeolite has been developed. Excited by a PZT layer, the microcantilevers are employed to detect the concentration of gas Freon-12 by the action of the specific molecular sifter. Tests of concentrations from 10ppm to 500ppm are carried out in a practical experimental cell. The results show that the relationship between the frequency shift and the concentration is linear for concentrations lower than 100ppm. The minimum mass changing of 3.5×10^-9 g and the sensitivity of -0.0026%/ppm also can be determined from the experimental results.

Keywords

gas sensors; microsensors; piezoelectric devices; zeolites; PZT layer; freon gas sensor; gas concentration; microporous material; molecular sifter; piezoelectric microcantilever; zeolite coating; Application specific integrated circuits; Chemical technology; Equations; Gas detectors; Mechanical engineering; Microelectronics; Piezoelectric materials; Resonance; Resonant frequency; Testing;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on

Print_ISBN

0-7803-6520-8

Type

conf

DOI

10.1109/ICSICT.2001.982010

Filename

982010