The investigation of the detection mechanism for micromachined accelerometers with gaseous proof mass

Author

Min, Miao ; Fuxue, Zhang ; Guoying, Wu

Author_Institution

Inst. of Microelectron., Peking Univ., Beijing, China

Volume

2

fYear

2001

fDate

22-25 Oct. 2001

Firstpage

808

Abstract

A new mechanism of acceleration detection is discussed in this paper, on the basis of which micromachined accelerometers with gaseous proof mass can be developed. The new concept of "Gas Pendulum" is introduced to theoretically explain this mechanism. Three types of macroscopic devices utilizing this mechanism are demonstrated. The experimental results show that the accelerometer can measure acceleration up to ±5g, and has a resolution better than 2 × 10^-4 g. The characteristics of this method and the prospect of its application in micromachined accelerometers are also discussed.

Keywords

acceleration measurement; accelerometers; microsensors; natural convection; pendulums; acceleration detection; acceleration measurement; detection mechanism; gas pendulum; gaseous proof mass; hermetic chamber; macroscopic devices; micromachined accelerometers; natural convection field; Acceleration; Accelerometers; Biomedical measurements; Fluid flow; Force sensors; Gravity; Heat transfer; Microelectronics; Space technology; Temperature;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on

Print_ISBN

0-7803-6520-8

Type

conf

DOI

10.1109/ICSICT.2001.982018

Filename

982018