Design and simulation of a novel micromachined comb-gimbal gyroscope

Author

Che, Lufeng ; Li, Xin ; Xiong, Bin ; Chen, Yao ; Wang, Yuelin

Author_Institution

Inst. of Metall., Acad. Sinica, Shanghai, China

Volume

2

fYear

2001

fDate

22-25 Oct. 2001

Firstpage

820

Abstract

A novel micromachined comb-gimbal gyroscope is presented, which will be excited by electrostatic forces and the coriolis acceleration induced torsion motion will be read out capacitively. Since electrostatic comb driving and DRIE (deep reactive ion etching) technology are adopted, large driving amplitude can be achieved and sensitivity of gyroscope can be increased. Based on the modal analysis of the gyroscope by FEM method, the structure dimensions are optimized according to resonant frequency matching of the driving mode and detection mode. The fabrication sequences of the gyroscope are discussed in detail.

Keywords

electrostatic devices; finite element analysis; gyroscopes; micromachining; micromechanical devices; sputter etching; DRIE; FEM method; coriolis acceleration induced torsion motion; deep reactive ion etching technology; detection mode; driving mode; electrostatic comb driving; electrostatic forces; micromachined comb-gimbal gyroscope; modal analysis; Acceleration; Damping; Electrostatics; Fingers; Frequency; Glass; Gyroscopes; Springs; Transducers; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated-Circuit Technology, 2001. Proceedings. 6th International Conference on

Print_ISBN

0-7803-6520-8

Type

conf

DOI

10.1109/ICSICT.2001.982021

Filename

982021