• DocumentCode
    2218673
  • Title

    Macroparticle filtering of high-current vacuum arc plasmas

  • Author

    Schülke, Thomas ; Anders, André ; Siemroth, Peter

  • Author_Institution
    Fraunhofer-Inst. for Mater. Phys. & Surface Eng., Dresden, Germany
  • Volume
    2
  • fYear
    1996
  • fDate
    21-26 Jul 1996
  • Firstpage
    914
  • Abstract
    The transport of vacuum arc plasmas through a 90° curved magnetic macroparticle filter was investigated using a high-current pulsed arc source with a carbon cathode. The peak arc current was in the range of a few kA, exceeding considerably the level of what has been reported in literature. The main question investigated was whether magnetic macroparticle filters could be scaled-up and simultaneously maintaining the transport efficiency of small filters. In front of the cathode we found arc-current-depending total ion saturation currents in the range from 10 to 23% of the arc current. The best transport efficiency was 25% (time integrated output/time integrated input) at a duct wall bias of 12.5 V and at an axial magnetic field of about 100 mT. This is comparable to what has been observed with other, low-current filters
  • Keywords
    cathodes; plasma density; plasma deposited coatings; plasma deposition; plasma production; plasma transport processes; vacuum arcs; 100 mT; 12.5 V; axial magnetic field; carbon cathode; diamond like carbon films deposition; duct wall bias; high-current pulsed arc source; high-current vacuum arc plasmas; low-current filters; macroparticle filtering; magnetic macroparticle filters; peak arc current; plasma density distribution; time integrated output/time integrated input; total ion saturation currents; transport efficiency; Cathodes; Ducts; Filtering; Filters; Magnetic fields; Magnetic separation; Plasma sources; Plasma transport processes; Saturation magnetization; Vacuum arcs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Discharges and Electrical Insulation in Vacuum, 1996. Proceedings. ISDEIV., XVIIth International Symposium on
  • Conference_Location
    Berkeley, CA
  • Print_ISBN
    0-7803-2906-6
  • Type

    conf

  • DOI
    10.1109/DEIV.1996.545497
  • Filename
    545497