• DocumentCode
    2226242
  • Title

    Mechanically compliant high contrast grating mirrors for radiation pressure cooling

  • Author

    Kemiktarak, Utku ; Metcalfe, Michael ; Durand, Mathieu ; Lawall, John

  • Author_Institution
    Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
  • fYear
    2011
  • fDate
    1-6 May 2011
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We have developed micromechanical membranes with high reflectivity and low mass for optical cooling. By patterning silicon nitride membranes with grating structures we have achieved reflectivity of R = 99% and a quality factor of Q = 1.6 × 104.
  • Keywords
    diffraction gratings; laser cooling; membranes; micro-optomechanical devices; micromirrors; optical fabrication; radiation pressure; reflectivity; silicon compounds; Si3N4; grating structures; micromechanical membranes; optical cooling; quality factor; radiation pressure cooling; reflectivity; silicon nitride membranes; Cavity resonators; Cooling; Mirrors; Optical device fabrication; Optical resonators; Resonant frequency; Silicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2011 Conference on
  • Conference_Location
    Baltimore, MD
  • Print_ISBN
    978-1-4577-1223-4
  • Type

    conf

  • Filename
    5950072
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2226242