A 10-50 GHz micromachined directional coupler

Author

Robertson, S.V. ; Katehi, L.P.B. ; Rebeiz, G.M.

Author_Institution

Radiat. Lab., Michigan Univ., Ann Arbor, MI, USA

Volume

2

fYear

1996

fDate

17-21 June 1996

Firstpage

797

Abstract

A 20 dB directional coupler has been designed and fabricated on a thin dielectric membrane using micromachining techniques. Design of the asymmetric tapered coupled line coupler relies on readily available models and ideal transmission line theory. The use of membrane technology results in less than 0.4 dB insertion loss in the coupler from 10 to 50 GHz. In addition, a micromachined packaging technique creates a shielded circuit which is extremely compact and lightweight.

Keywords

electromagnetic shielding; membranes; micromachining; microstrip directional couplers; millimetre wave directional couplers; transmission line theory; 0.4 dB; 10 to 50 GHz; EHF; SHF; asymmetric tapered coupled line coupler; insertion loss; micromachined directional coupler; micromachined packaging technique; micromachining techniques; shielded membrane microstrip; thin dielectric membrane; transmission line theory; Biomembranes; Coupling circuits; Dielectric substrates; Directional couplers; Frequency; Impedance; Insertion loss; Packaging; Silicon; Transmission line theory;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium Digest, 1996., IEEE MTT-S International

Conference_Location

San Francisco, CA, USA

ISSN

0149-645X

Print_ISBN

0-7803-3246-6

Type

conf

DOI

10.1109/MWSYM.1996.511058

Filename

511058