• DocumentCode
    2229110
  • Title

    The model of the optical tomographic Microscope resolution

  • Author

    Danilova, T.V. ; Volkov, Y.P. ; Manturov, A.O. ; Yudakov, M.A.

  • Author_Institution
    Saratov State Tech. Univ., Saratov, Russia
  • fYear
    2011
  • fDate
    12-16 Sept. 2011
  • Firstpage
    822
  • Lastpage
    823
  • Abstract
    In this work the results of numerical estimations of the Optical Scanning Microscope resolution with tomography method reconstruction of Object Image are presented. Using the Mie theory methods, we analyze the scattering of the illuminated light beam and obtain the resolution limit estimations for UV light and soft X-ray illumination sources. As it is shown the spatial resolution of possible Optical Scanning Microscope can achieve 40-60 nm limit at UV illumination source (λ=206 nm).
  • Keywords
    electromagnetic wave scattering; image processing; image reconstruction; optical microscopes; optical tomography; Mie theory methods; UV illumination source; UV light; illuminated light beam; object image; optical scanning microscope resolution; optical tomographic microscope resolution; soft X-ray illumination sources; wavelength 40 nm to 60 nm; Microscopy; Optical imaging; Optical microscopy; Optical reflection; Optical scattering; Spatial resolution;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Microwave and Telecommunication Technology (CriMiCo), 2011 21th International Crimean Conference
  • Conference_Location
    Sevastopol
  • Print_ISBN
    978-1-4577-0883-1
  • Type

    conf

  • Filename
    6069167
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2229110