Elastic surface wave devices based on piezoelectric thick films

Author

De Cicco, G. ; Morten, B. ; Prudenziati, M.

Author_Institution

Dipartimento di Fisica, Modena Univ.

fYear

1993

fDate

31 Oct-3 Nov 1993

Firstpage

281

Abstract

A study has been performed for the development of elastic-wave structures, involving screen printed and fired piezoelectric layers on non-piezoelectric substrates, intended for new families of thick film sensors. This study considers electroacoustic effects, i.e. the coupling between the electromechanical parameters of the layers and the elastic properties of the substrate, related to wave propagation. In this work particular attention is devoted to devices implemented on alumina substrates where SAW as well as (symmetric and anti-symmetric) Lamb waves are generated. The realisation processes and the performance characteristics of these structures are presented

Keywords

acoustoelectric devices; piezoelectric thin films; surface acoustic wave devices; thick film devices; Al₂O₃; Lamb waves; SAW waves; alumina substrates; elastic surface wave devices; electroacoustic effects; piezoelectric thick films; thick film sensors; Biosensors; Electrodes; Piezoelectric devices; Piezoelectric materials; Sensor phenomena and characterization; Substrates; Surface acoustic waves; Surface waves; Thick film sensors; Thick films;

fLanguage

English

Publisher

ieee

Conference_Titel

Ultrasonics Symposium, 1993. Proceedings., IEEE 1993

Conference_Location

Baltimore, MD

Print_ISBN

0-7803-2012-3

Type

conf

DOI

10.1109/ULTSYM.1993.339571

Filename

339571