DocumentCode
2231359
Title
Resonant MOEMS scanner design and dynamics
Author
Urey, H.
Author_Institution
KOC Univ., Istanbul, Turkey
fYear
2002
fDate
20-23 Aug. 2002
Firstpage
83
Lastpage
84
Abstract
In scanning systems, the speed of scanning, scanner resolution, and power requirements can be substantially reduced by using high-Q resonant scanners. We discuss the scanner features and dynamic modeling of resonant scanners for display and imaging applications.
Keywords
micro-optics; optical scanners; display applications; dynamic model; imaging applications; resonant MOEMS scanner; Capacitance; Displays; Dynamic voltage scaling; Electrostatic actuators; Frequency; Micromechanical devices; Mirrors; Nonlinear optics; Optical sensors; Resonance;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMs, 2002. Conference Digest. 2002 IEEE/LEOS International Conference on
Conference_Location
Lugano, Switzerland
Print_ISBN
0-7803-7595-5
Type
conf
DOI
10.1109/OMEMS.2002.1031454
Filename
1031454
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