DocumentCode
2231429
Title
Microelectronics Manufacturing Education
Author
Fuller, L.F. ; Pearson, R.E. ; Turkman, I.R. ; Kurinec, S.K. ; Lane, R.L. ; Jackson, M.A. ; Smith, B.W.
Author_Institution
Rochester Institute of Technology Microelectronic Engineering, NY
fYear
1993
fDate
18-19 Oct 1993
Firstpage
26
Lastpage
33
Keywords
Circuits; Educational institutions; Educational programs; Fabrication; Laboratories; Manufacturing processes; Materials science and technology; Microelectronics; Semiconductor device manufacture; Semiconductor devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
Type
conf
DOI
10.1109/ASMC.1993.682473
Filename
682473
Link To Document