Design and realization of magnetic actuators for optical matrix micro-switches

The research presented here deals with the design and the realization of matrix of copper microcoils as flat magnetic actuators for the actuation of optical matrix micro-switches. The matrix of micro-switches is composed by an array of vertical mirror supported by a silicon base. The bases are supported by springs connected to the frame of the matrix. The fixed optical fibers are inserted on the outer frame inside V-grooves. Due to the diameter of the light beam from optic fibers, large out-of-plane vertical displacements of the mirrors (more than 100 /spl mu/m) are to be achieved. This is compatible with large range electromagnetic actuation rather than electrostatic actuation. Earlier calculations performed under ANSYS/sup TM/ 5.6 showed that a magnetic force of about one milinewton is able to move the mirrors with such displacement range. Magnetic simulations have been performed under FLUX2D/sup TM/ in order to appraise some parameters in a real actuation configuration where the matrix of micro-coils is located below the matrix of micro-switches.