• DocumentCode
    2231753
  • Title

    What Happens to Gas Cylinder Purity as Content is Consumed?

  • Author

    Albert ; Amato, P. ; Brzychcy, A.M. ; Chen, A.M. ; Flaherty, Y. ; Johns, E. ; Sanborn, L.

  • Author_Institution
    Matheson Gas Products, Inc., Gloucester, MA
  • fYear
    1993
  • fDate
    18-19 Oct 1993
  • Firstpage
    86
  • Lastpage
    91
  • Keywords
    Boron; Chemicals; Electronics industry; Gases; Helium; Hydrogen; Moisture; Nitrogen; Semiconductor impurities; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
  • Type

    conf

  • DOI
    10.1109/ASMC.1993.682486
  • Filename
    682486
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2231753