DocumentCode

2232195

Title

Statistical Optimization Of Aluminum Etch In The Ame 8330 Utilizing Total Productive Maintenance

Author

Guy, Brian K. ; Herron, B.I.

Author_Institution

Harris Semiconductor, Melbourne, FL

fYear

1993

fDate

18-19 Oct 1993

Firstpage

115

Lastpage

117

Keywords

Aluminum; Corrosion; Etching; Fluid flow; Heat transfer; Nitrogen; Personnel; Plasma temperature; Resists; Temperature control;

fLanguage

English

Publisher

ieee

Conference_Titel

Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI

Type

conf

DOI

10.1109/ASMC.1993.682493

Filename

682493