New resonant accelerometer based on rigidity change

Author

Omura, Yoshiteru ; Nonomura, Yutaka ; Tabata, Osamu

Author_Institution

Toyota Central Res. & Dev. Labs. Inc., Aichi, Japan

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

855

Abstract

We propose a new resonant accelerometer based on the principle of a resonator rigidity change caused by the applied acceleration. The rigidity change of the resonator consisting of parallel beams is induced by a change in its cross-sectional shape. The feasibility of this sensing principle was confirmed by FEM analysis. A frequency change rate of 10%/g was calculated, and the sensor was fabricated by surface micromachining technology using an SOI wafer. Furthermore, we confirmed that the double resonator structure which was designed based on the same principle had a lower cross-axis sensitivity

Keywords

accelerometers; elemental semiconductors; finite element analysis; micromechanical resonators; microsensors; silicon; FEM analysis; SOI wafer; Si; cross-axis sensitivity; cross-sectional shape; double resonator structure; feasibility; frequency change rate; parallel beams; resonant accelerometer; surface micromachining technology; Acceleration; Accelerometers; Electrodes; Fabrication; Micromachining; Particle beams; Research and development; Resonance; Resonant frequency; Shape;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635236

Filename

635236