• DocumentCode
    2232473
  • Title

    Effects and Interactions of Wafer Shape and Stepper Chucks on Wafer Flatness Control

  • Author

    Goodall, R. ; Kawski, J.

  • Author_Institution
    ADE Corporation, Newton, MA
  • fYear
    1993
  • fDate
    18-19 Oct 1993
  • Firstpage
    118
  • Lastpage
    123
  • Keywords
    Clamps; Data mining; Geometry; Lithography; Manufacturing; Metrology; Random access memory; Shape control; Shape measurement; Thickness measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1993. ASMC 93 Proceedings. IEEE/SEMI
  • Type

    conf

  • DOI
    10.1109/ASMC.1993.682494
  • Filename
    682494
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2232473