Compact analytical models for squeeze film damping with arbitrary venting conditions

Author

Darling, Robert ; Yang, Jian

Author_Institution

Dept. of Electr. Eng., Washington Univ., Seattle, WA

Volume

2

fYear

1997

fDate

16-19 Jun 1997

Firstpage

1113

Abstract

A Green´s function method is described which allows the resulting forces from compressible squeeze film damping to be rapidly calculated for arbitrary acoustic venting conditions along the edges of a moveable structure. The resulting models are computationally compact, and thus applicable for dynamic system simulation purposes. Arbitrary deflection profiles can also be treated, enabling the calculation of damping effects for cantilevers, diaphragms, tilting modes, and drum-head modes

Keywords

Green´s function methods; acoustic impedance; damping; diaphragms; micromechanical devices; modelling; Green´s function method; analytical models; arbitrary deflection profiles; arbitrary venting conditions; cantilevers; complex acoustic impedance; computationally compact models; diaphragms; drum-head modes; dynamic system simulation; linearized Reynold´s equation; micromachined structures; moveable structure edges; squeeze film damping; tilting modes; Acoustic transducers; Analytical models; Biomembranes; Boundary conditions; Computational modeling; Damping; Eigenvalues and eigenfunctions; Equations; Impedance; Solid state circuits;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on

Conference_Location

Chicago, IL

Print_ISBN

0-7803-3829-4

Type

conf

DOI

10.1109/SENSOR.1997.635397

Filename

635397