DocumentCode
2247543
Title
Electronics for micromachined inertial sensors
Author
Boser, Bernhard E.
Author_Institution
Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Volume
2
fYear
1997
fDate
16-19 Jun 1997
Firstpage
1169
Abstract
Capacitive interface circuits for micromachined sensors are described. The focus is on the position sense electronics for accelerometers and gyroscopes. Special attention is given to the characteristics of the interface between the sensor and electronic circuits, and on practical and fundamental noise mechanisms that limit the achievable resolution
Keywords
accelerometers; capacitance measurement; displacement measurement; gyroscopes; micromechanical resonators; microsensors; noise; accelerometers; capacitive interface circuits; capacitive sensing; electronic circuits; gyroscopes; integrated sensors; micromachined inertial sensors; noise mechanisms; position sense electronics; resolution; Acceleration; Accelerometers; Capacitive sensors; Capacitors; Circuits; Gyroscopes; Mechanical sensors; Sensor phenomena and characterization; Springs; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on
Conference_Location
Chicago, IL
Print_ISBN
0-7803-3829-4
Type
conf
DOI
10.1109/SENSOR.1997.635413
Filename
635413
Link To Document