Robotic workstation for AFM-based nanomanipulation inside an SEM

Combining the SEM as a visual sensor with the force control of an AFM promises to provide a unique tool for automated robotic nanomanipulations. This article presents the development of a nanorobotic workstation that can use AFM capabilities for robotic nanomanipulations inside an SEM. The hardware architecture for the AFM setup inside the SEM is described in detail. The AFM capabilities are demonstrated by in-situ acquired AFM and SEM images of identical sample locations. Initial AFM-based manipulation experiments on manipulating a graphene sheet and on pushing nanosized polymer beads are presented. The integration of the system with haptic feedback for teleoperation and into a robotic automation and visual control framework is discussed.