Polarization-analyzing CMOS image sensor using monolithically embedded polarizer for microchemistry systems

Author

Tokuda, Takashi ; Yamada, Hirofumi ; Sasagawa, Kiyotaka ; Ohta, Jun

Author_Institution

Grad. Sch. of Mater. Sci., Nara Inst. of Sci. & Technol. (NAIST), Nara, Japan

fYear

2009

fDate

24-27 May 2009

Firstpage

313

Lastpage

316

Abstract

A polarization-analyzing CMOS image sensor was designed. The sensor was designed with target applications of intelligent microchemistry system. Embedded wire grid polarizer with various angles was configured on the photodiodes. The performances of the sensor were characterized and it was demonstrated that the sensor can be used for polarization measurement with an accuracy of 0.04 deg. A polarimetric measurement of chiral solution was also successfully demonstrated.

Keywords

CMOS image sensors; electrochemical sensors; intelligent sensors; microsensors; CMOS image sensor; embedded wire grid polarizer; intelligent microchemistry system; monolithic embedded polarizer; photodiodes; polarimetric measurement; polarization analysis; polarization measurement; CMOS image sensors; CMOS technology; Chemical sensors; Intelligent sensors; Materials science and technology; Optical polarization; Photodiodes; Sensor arrays; Sensor phenomena and characterization; Temperature sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 2009. ISCAS 2009. IEEE International Symposium on

Conference_Location

Taipei

Print_ISBN

978-1-4244-3827-3

Electronic_ISBN

978-1-4244-3828-0

Type

conf

DOI

10.1109/ISCAS.2009.5117748

Filename

5117748