Validating fast simulation of air damping in micromachined devices

Author

Xin Wang ; Judy, M. ; White, J.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

210

Lastpage

213

Abstract

Optimization of the dynamic performance of air-packaged micromachined devices requires accurate estimation of viscous drag forces, but such simulations can be prohibitively time-consuming if the finite element method (FEM) or the finite difference method (FDM) is used. The recently developed precorrected-FFT accelerated boundary element method (BEM) solver FastStokes has made substantial changes to this situation. To further determine the accuracy of the FastStokes solver, the simulation results of the ADXL76 accelerometer and a micro-mirror are discussed in this paper. Close matches between simulation results and testing results prove the efficiency and broad applicability of this fast Stokes flow solver.

Keywords

accelerometers; boundary-elements methods; damping; drag; fast Fourier transforms; flow simulation; micro-optics; micromechanical devices; viscosity; ADXL76 accelerometer; FastStokes simulation; MEMS; Stokes flow; air damping; air-packaged micromachined devices; dynamic performance optimization; micro-mirror; precorrected-FFT accelerated boundary element method solver; simulation results; testing results; viscous drag forces; Acceleration; Boundary element methods; Damping; Finite difference methods; Geometry; Integral equations; Iterative algorithms; Kernel; Navier-Stokes equations; Packaging;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984241

Filename

984241