SU-8 based piezoresistive mechanical sensor

Author

Thaysen, J. ; Yalcinkaya, A.D. ; Vestergaard, R.K. ; Jensen, S. ; Mortensen, M.W. ; Vettiger, P. ; Menon, A.

Author_Institution

CANTION A/S, Tech. Univ. of Denmark, Lyngby, Denmark

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

320

Lastpage

323

Abstract

We present the first SU-8 based piezoresistive mechanical sensor. Conventionally, silicon has been used as a piezoresistive material due to its high gauge factor and thereby high sensitivity to strain changes in a sensor. By using the fact that SU-8 is much softer than silicon and that a gold resistor is easily incorporated in SU-8, we have proven that a SU-8 based cantilever sensor is almost as sensitive to stress changes as the silicon piezoresistive cantilever. We demonstrate the chip fabrication, and characterization with respect to sensitivity, noise and device failure.

Keywords

electron device noise; failure analysis; microsensors; molecular electronics; photoresists; piezoresistive devices; strain sensors; stress measurement; Au; MEMS; SU-8 based cantilever sensor; SU-8 based piezoresistive mechanical sensor; chip fabrication; device failure; gold resistor; high gauge factor; integrated piezoresistive readout; noise; piezoresistive material; sensitivity; Biosensors; Chip scale packaging; Gold; Immune system; Mechanical sensors; Piezoresistance; Resistors; Sensor phenomena and characterization; Silicon; Stress;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984267

Filename

984267