DocumentCode
2253956
Title
Reliability of polycrystalline silicon under long-term cyclic loading
Author
Bagdahn, J. ; Sharpe, W.N., Jr.
Author_Institution
Dept. of Mech. Eng., Johns Hopkins Univ., Baltimore, MD, USA
fYear
2002
fDate
24-24 Jan. 2002
Firstpage
447
Lastpage
450
Abstract
The long-term mechanical behavior of 3.5 /spl mu/m thick and 50 /spl mu/m wide polysilicon tensile specimens under tension-tension cyclic loading was investigated. The initial fracture strength, /spl sigma//sub c/, was 1.1 GPa. If the applied maximum cyclic stress was reduced by about 35% to a value of /spl sigma//sub f/=0.75 GPa, the specimens failed after 10/sup 8/ cycles. No influence of frequency in the range of 50 to 1000 Hz was observed.
Keywords
elemental semiconductors; fatigue; fracture toughness; reliability; silicon; 50 to 1000 Hz; MEMS material; Si; fracture strength; long-term mechanical characteristics; polycrystalline silicon; reliability; tension-tension cyclic loading; Fatigue; Frequency; Humidity; Optical materials; Rough surfaces; Silicon; Surface cracks; Surface roughness; Tensile stress; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Conference_Location
Las Vegas, NV, USA
ISSN
1084-6999
Print_ISBN
0-7803-7185-2
Type
conf
DOI
10.1109/MEMSYS.2002.984299
Filename
984299
Link To Document