• DocumentCode
    2254406
  • Title

    A rotational comb-driven micromirror with a large deflection angle and low drive voltage

  • Author

    Tsuboi, O. ; Mizuno, Y. ; Koma, N. ; Soneda, H. ; Okuda, H. ; Ueda, S. ; Sawaki, I. ; Yamagishi, F.

  • Author_Institution
    Fujitsu Labs. Ltd., Japan
  • fYear
    2002
  • fDate
    24-24 Jan. 2002
  • Firstpage
    532
  • Lastpage
    535
  • Abstract
    We have designed, fabricated, and tested a V-shaped torsion bar for use with a comb-driven micromirror. This torsion bar suppressed undesired sticking of the comb teeth, and enabled a large rotational angle and a low drive voltage. We observed 5-degree rotation of a comb-driven micromirror with a drive voltage of 90 V.
  • Keywords
    micro-optics; mirrors; torsion; 90 V; V-shaped torsion bar; deflection angle; drive voltage; rotational comb-driven micromirror; Bars; Electrostatic actuators; Fabrication; Laboratories; Low voltage; Micromirrors; Mirrors; Springs; Teeth; Testing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
  • Conference_Location
    Las Vegas, NV, USA
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-7185-2
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2002.984326
  • Filename
    984326
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2254406