Product development of a MEMS optical scanner for a laser scanning microscope

Author

Miyajima, H. ; Asaoka, N. ; Isokawa, T. ; Ogata, M. ; Aoki, Y. ; Imai, M. ; Fujimori, O. ; Katashiro, M. ; Matsumoto, K.

Author_Institution

Olympus Opt. Co. Ltd., Tokyo, Japan

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

552

Lastpage

555

Abstract

A MEMS electromagnetic optical scanner for horizontal scanning in a laser scanning microscope has been developed. Although few MEMS actuators have been commercialized to date, it has successfully satisfied all the specifications including not only the fundamentals such as resonant frequency and maximum scan angle but also those for a commercial product such as scanning stability and reliability. It will be commercialized as a part of our product, OLS1100 in the second half of FY 2001.

Keywords

micro-optics; microactuators; micromechanical resonators; optical microscopes; optical scanners; MEMS actuators; MEMS optical scanner; OLS1100 product development; double-side polished SOI wafer; horizontal scanning; laser scanning confocal microscope; laser scanning microscope; maximum scan angle; reliability; resonant frequency; scanning stability; Coils; Commercialization; Fasteners; Micromechanical devices; Mirrors; Optical films; Optical microscopy; Optical sensors; Product development; Resonance;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984331

Filename

984331