Tunable thermo-optic filter for WDM applications

Author

Hohlfeld, D. ; Epmeier, M. ; Zappe, H.

Author_Institution

Lab. for Micro-optics, Freiburg Univ., Germany

fYear

2002

fDate

24-24 Jan. 2002

Firstpage

564

Lastpage

567

Abstract

In this paper we present a novel MEMS-based concept for tunable optical filters for use in wavelength-division multiplexing (WDM) systems. Such a filter is essential for monitoring and reconfiguration of optical networks. Our device is based on a Fabry-Perot interferometer employing a silicon cavity and silicon-based dielectric Bragg mirrors. It is fabricated as a free-standing membrane. Wavelength tuning is achieved through thermal modulation of the resonator´s optical thickness. We present the measurement of optical filter performance and tunability. Numerical simulation results of its steady-state and transient thermal behavior are also given.

Keywords

Fabry-Perot interferometers; micro-optics; micromechanical resonators; mirrors; optical communication equipment; optical filters; optical tuning; thermo-optical effects; wavelength division multiplexing; 1609 to 1614 nm; Fabry-Perot interferometer; MEMS-based tunable thermo-optic filter; WDM applications; dielectric Bragg mirrors; free-standing membrane; numerical simulation; optical network reconfiguration; resonator optical thickness; silicon cavity; steady-state behavior; thermal modulation; transient thermal behavior; tunable optical filters; wavelength tuning; wavelength-division multiplexing; Dielectric devices; Fabry-Perot interferometers; Monitoring; Optical fiber networks; Optical filters; Optical resonators; Resonator filters; Silicon; Thermooptical devices; Wavelength division multiplexing;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on

Conference_Location

Las Vegas, NV, USA

ISSN

1084-6999

Print_ISBN

0-7803-7185-2

Type

conf

DOI

10.1109/MEMSYS.2002.984334

Filename

984334