DocumentCode
2254985
Title
Design of a low-cost MEMS monolithically-integrated relative humidity sensor
Author
Cicek, Paul-Vahé ; Saha, Tanmoy ; Waguih, Bichoy ; Nabki, Frederic ; El-Gamal, Mourad N.
Author_Institution
McGill Univ., Montreal, QC, Canada
fYear
2010
fDate
19-22 Dec. 2010
Firstpage
172
Lastpage
175
Abstract
This paper presents MEMS capacitive-based humidity sensors for monolithic integration with CMOS electronics. The fabrication process and design of the sensors are described. Performance is evaluated with theoretical analysis and finite-elements simulation. The design achieves a sensitivity greater than 0.225%/%RH and a response time faster than 1 s.
Keywords
CMOS integrated circuits; finite element analysis; humidity sensors; microsensors; monolithic integrated circuits; CMOS electronics; MEMS capacitive-based humidity sensor; finite element simulation; low cost MEMS monolithically integrated relative humidity sensor; Capacitance; Electrodes; Humidity; Moisture; Sensitivity; Sensors; Time factors; Humidity; MEMS; integration; sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Microelectronics (ICM), 2010 International Conference on
Conference_Location
Cairo
Print_ISBN
978-1-61284-149-6
Type
conf
DOI
10.1109/ICM.2010.5696107
Filename
5696107
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