Evaluation of phthalocyanine film deposition using hybrid sensor of quartz crystal microbalance and optical waveguide spectroscopy

A hybrid sensor of quartz crystal microbalance (QCM) and optical waveguide (OWG) spectroscopies was prepared, and in-situ observations were carried out for lead phthalocyanine (PbPc) film depositions using vacuum evaporation technique. The peak wavelength of the absorption spectra changed with the PbPc film thickness. The responses of QCM frequency and optical absorption were also observed, and they suggested the phase formation changed with the thickness. Furthermore, the X-ray diffraction (XRD) pattern and the atomic force microscope (AFM) image were investigated for the film.